Separate domain formation in Ge2Sb2Te5–SiOx mixed layer

We report separate domain formation in cosputtered Ge2Sb2Te5–SiOx mixed layer, with SiOx amount less than 10mol%. As-prepared Ge2Sb2Te5–SiOx layer exhibits amorphous phase with separate domains smaller than 20nm. The separation maintains after thermal annealing, which results in crystallization into fcc phase. The crystallization activation energies of Ge2Sb2Te5–SiOx are obtained as 4.99 and 6.44eV for mixed layers containing 5.3 and 8.4mol% SiOx, respectively. Those are larger than 2.75eV of pure Ge2Sb2Te5. Furthermore, the mixed layer exhibits sublimation at increased temperature. These are interpreted as formation of Ge2Sb2Te5-rich domains separated from each other by SiOx-rich domains.