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February 1, 1998Plasma Sources Science and TechnologyOpen Access

Model and measurements for a planar inductive oxygen discharge

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Authors

JGJón Tómas GuðmundssonUniversity of IcelandMLM. A. LiebermanUniversity of California, Berkeley

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Guðmundsson et al. (1998) studied this question.

synapsesocial.com/papers/6a9102489eff36e44092d028https://doi.org/10.1088/0963-0252/7/1/002
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