A high efficiency ultrahigh vacuum compatible flat field spectrometer for extreme ultraviolet wavelengths

A custom, flat field, extreme ultraviolet spectrometer built specifically for use with low power light sources that operate under ultrahigh vacuum conditions is reported. The spectral range of the spectrometer extends from 4 nm to 40 nm. The instrument optimizes the light gathering power and signal-to-noise ratio while achieving good resolution. A detailed description of the spectrometer and design considerations are presented, as well as a procedure that could be used to obtain a synthetic wavelength calibration with the aid of only a single known spectral feature. This synthetic wavelength calibration is compared to a standard wavelength calibration obtained from previously reported spectral lines of Xe, Ar, and Ne ions recorded with this spectrometer.