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March 1, 1987Journal of The Electrochemical Society

The Evolution of Si / SiO2 Interface Roughness

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Authors

ACA. H. CarimNXP (Netherlands)RSRodney SinclairThe University of Melbourne

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Cite This Study

Carim et al. (1987) studied this question.

synapsesocial.com/papers/6a91100a56ba240a28cae252https://doi.org/10.1149/1.2100544
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