2D and 1H Nuclear Magnetic Resonance Study of Deuterated Amorphous Silicon and Partially Deuterated Hydrogenated Amorphous Silicon

Bonding states and spatial distributions of deuterons and hydrogens in deuterated amorphous silicon and partially deuterated hydrogenated amorphous silicon have been studied by means of 2D and 1H nuclear magnetic resonances (NMR). Four kinds of deuteron line shapes are observed, corresponding to different bonding states: SiD and Si(H, D)2 in a rigid state, Si(H, D)3 in a freely rotating state, Si(H, D) n (n=1, 2, and 3) in a constrained mobile state, and D2 molecules in a freely mobile state. The relative intensities of the four states depend on the deposition conditions. The NMR results demonstrate that hydrogens and deuterons do not distribute randomly. The deuterons preferentially locate near the microvoids.