A Soft Lithography Approach to the Fabrication of Nanostructures of Single Crystalline Silicon with Well-Defined Dimensions and Shapes

Silicon nanostructures with well defined shapes and tightly controlled dimensions can be fabricated in relatively large quantities using the soft lithography approach described here. The capability and feasibility of this method are demonstrated by the fabrication of silicon nanowires, nanorods, micrometer-sized rings (see Figure), and connected triangles (see also inside front cover).