Determination of the dielectric constant of GaN in the kHz frequency range

Capacitance techniques are used to show that the dielectric constant ε || of GaN in the kHz frequency range is 10.6 ± 0.3. The data allow depth information to be accurately extracted using methods such as mercury probe capacitance profiling. The measurements complement the pre-existing data which are derived from infrared reflectivity and which give a value of 10.4 ± 0.3.