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Direct modulation with 10Gbit/s and 1:10 extinction ratio with low chirp of 0.3nm is achieved with a 1.5μm InGaAsP/InP MQW DFH laser monitor diode photonic integrated circuit (PIC). Uniform laser mirrors and monitor diode facets are reactive ion etched using a CH4/H2/CO2 gas mixture.
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Dütting et al. (1993) studied this question.
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