Solid lubricant films of MoS2 with improved adhesion to a stainless-steel substrate have been deposited by a combination of rf sputtering and ion implantation with inert gas ions in the 100-keV region. When the sputter film had obtained a thickness of 500 Å, it was subjected to the ionic bombardment prior to completion of the sputter deposition. Dependent on the ion dose an adhesion improvement and a sliding life enhancement of approximately a factor of 2 were obtained for the solid lubricant film.
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Chevallier et al. (1986) studied this question.
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