Automated Micro-Raman Mapping and Imaging Applied to Silicon Devices and Zirconia Ceramic Stress and Grain Boundary Morphology

An automated, point-by-point, Raman mapping and imaging system is described that combines a 0.5- μm stepper-motor-driven stage, a Raman microscope, and a filter spectrograph with an intensified diode array detector. High-resolution Raman images of a silicon device structure and a map showing the presence of the monoclinic phase of zirconia (ZrO 2 ) at grain boundaries and in stressed regions of a sintered tetragonally stabilized ceramic are reported. The importance of image processing is demonstrated and emphasised.