Thin amorphous and polycrystalline tungsten oxide films were prepared by chemical vapour deposition at atmospheric pressure from a metalorganic precursor — tungsten hexacarbonyl. The dependence of the structural and optical properties of tungsten oxide films on the technological conditions has been investigated by XRD, Raman spectroscopy and spectroscopic ellipsometry.
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Gogova et al. (1999) studied this question.
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