The induced plasma torch as a high‐temperature chemical reactor. I. Oxidation of silicon tetrachloride

Four torches of different design were constructed and evaluated. Injection of silicon tetrachloride vapour directly into the plasma resulted in instability and rapid extinction of the latter when the reagent flow rate exceeded 4 g/min. In the preferred design, the reagent was injected into the plasma tail flame through radial ports. With this system silicon tetrachloride was completely oxidised at a flow rate of at least 67 g/min.