An absolute barometric pressure sensor which has shown exceptional performance is described in the paper. It consists of a mechanical resonator whose resonant frequency is changed by strain induced by applied pressure. The active element is formed in one piece, from single-crystal silicon, by microengineering techniques. It has a range from vacuum to a pressure of over 1 bar (105 Pa) and can resolve less than 1 part in 105 of full scale.
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Greenwood et al. (1988) studied this question.