Influence of H-C bonds on the stopping power of hard and soft carbonized layers

Soft and hard carbon-hydrogen films were deposited in a rf glow discharge. Their stopping powers were deduced from depth-profile analysis by means of proton enhanced-cross-section scattering at around 1.5 MeV and ⁴He⁺ elastic-recoil detection at 2.6 MeV. In the case of soft films, ion-induced hydrogen depletion allowed study of the dependence of the stopping on hydrogen concentration. The presence of hydrogen increases the stopping power of the film by a factor of up to {~}2 compared to the predicted value for pure carbon. Moreover, Bragg's rule underestimates the total stopping considerably. However, good agreement is obtained with a recent theoretical model by Sabin et al. which takes into account the different C-C and C-H chemical bonds.