Nanostructure and Composition Control of Fluorocarbon Films from Modulated Tetrafluoroethylene Plasmas

ADVERTISEMENT RETURN TO ISSUEPREVCommunication to the...Communication to the EditorNEXTNanostructure and Composition Control of Fluorocarbon Films from Modulated Tetrafluoroethylene PlasmasG. Cicala, A. Milella, F. Palumbo, P. Rossini, P. Favia, and R. d'AgostinoView Author Information Istituto di Metodologie Inorganiche e dei Plasmi, CNR, Sezione di BARI, Dipartimento di Chimica-Università di Bari, Via Orabona, 4, 70126 Bari, Italy Cite this: Macromolecules 2002, 35, 24, 8920–8922Publication Date (Web):October 22, 2002Publication History Received18 April 2002Revised4 October 2002Published online22 October 2002Published inissue 1 November 2002https://pubs.acs.org/doi/10.1021/ma025536ehttps://doi.org/10.1021/ma025536erapid-communicationACS PublicationsCopyright © 2002 American Chemical SocietyRequest reuse permissionsArticle Views287Altmetric-Citations43LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InRedditEmail Other access optionsGet e-Alertsclose SUBJECTS:Crystal structure,Deposition,Morphology,Plasma,Thin films Get e-Alerts