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November 1, 1999Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Fourier transform infrared spectroscopy of effluents from pulsed plasmas of 1,1,2,2-tetrafluoroethane, hexafluoropropylene oxide, and difluoromethane

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Authors

CLCatherine B. LabelleIntel (United States)SKSimon KareckiMassachusetts Institute of TechnologyRRR. ReifMassachusetts Institute of Technology

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Labelle et al. (1999) studied this question.

synapsesocial.com/papers/6a919a93d613fa9f3b466da5https://doi.org/10.1116/1.582076
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