We characterize three as-deposited anatase TiO2 (a-TiO2) films with different deposition flux angles of 0°, 53°, and 86° tilted to Si ⟨001⟩ using thermoreflectance (TR) measurement in the temperature range between 30 and 300 K. The TR spectra at low temperature clearly show considerable difference in interband transitions of the tetragonal a-TiO2 with the largely top plane of {001} or the largely side planes of {100} and {010}. The indirect and direct interband transitions of the a-TiO2 are evaluated. The temperature dependences of the interband transition energies of the a-TiO2 are analyzed. The optical-axial anisotropy of the a-TiO2 films is discussed.
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Ho et al. (2008) studied this question.