Contrast in the electron spectroscopic imaging mode of a TEM

SUMMARY An energy‐filtering microscope working at 80 keV is used for the investigation of the effect of inelastic scattering on Bragg contrast. Inelastic scattering results in a preservation of Bragg contrast but edge and bend contours are blurred by a spectrum of excitation errors due to the angular distribution of inelastic scattering. This blurring and the chromatic aberration results in a decrease of contrast and resolution for thick specimens. Therefore, contrast and resolution can be increased by zero‐loss filtering as shown by evaporated films of increasing thickness below 150 μg/cm2. Up to ∼300 μg/cm2 an energy‐filtered image at the most probable energy shows the best results. The results obtained are extrapolated to energy‐filtered high‐voltage electron microscopy.