Tribology and Structure of Carbon Thin Films Deposited by Plasma-Free Sputtering Method

Carbon thin films are used as an overlayer in the magnetic recording media. There are several methods for preparing carbon thin films at a low gas pressure. The Facing Targets Sputtering (FTS) system is one of the best methods for preparing even magnetic thin films on a plasma-free substrate at a high deposition rate and low substrate temperature. The structure of the carbon thin films, which were prepared by the FTS system, was amorphous from the viewpoint of the X-ray diffraction. In the laser raman spectrum, the peak which showed the existence of sp3 bond in the carbon thin films was clearly observed. This pattern was the same as that of the i-carbon, that is, the diamond-like carbon. This diamond-like carbon thin films were very excellent in the sliding, tap and scratch test. When the substrate was coated with carbon thin films prepared by the FTS system, its surface was protected almost perfectly.