Effect of Fluorine Concentration on the Metal-Insulator-Semiconductor (MIS) Solar Cell Output Performance by Liquid Phase Deposition

Metal-insulator-semiconductor (MIS) solar cells with the insulating layer fabricated by liquid phase deposition (LPD) method has been shown to have good output performance in various literature published. In this paper, a high quality insulating layer is developed via LPD method with the fluorine content controlled by the growth solution concentration. The addition of fluorine to enhance the solar cell efficiency is first discussed. Then an optimum fluorine content is suggested at the end of this paper. The value of the fluorine content is controlled by growth solution concentration. Solar cells with thin fluorinated oxide film reveals good performance in the illuminated characteristics. And thus novel fluorinated thin oxide film is a good candidate for the replacement of existing MIS junction I-layer.