Synthesis and Stabilization of Stibine for Low-Temperature Chemical Vapor Deposition of Carbon-Free Antimony Films

Antimony trihydride(stibine), SbH 3, and antimony trideuteride, SbD 3, were synthesized in high yields via a unique nonaqueous synthetic route. A study comparing the relative thermal stability of SbD 3 with that of SbH 3 was performed. Deuterated stibine displays significantly greater thermal stability than its hydride analogue due to isotopic stabilization and can be stored at room temperature for weeks with minimal decomposition. The thermal decomposition of SbD 3 was performed at 300 °C in a horizontal, hot-wall chemical vapor deposition (CVD) reactor. Decomposition efficiencies approaching 50% were achieved when SbD 3 was delivered with H 2 as a carrier gas. As this research demonstrates, deuterated stibine is an improved CVD source due to its gaseous nature, compositional simplicity, lack of Sb−C bonds, enhanced thermal stability, and ability to deposit Sb films at very low temperatures.