Elastic model for the partially coherent growth of metallic superlattices. I. Interdiffusion, strain, and misfit dislocations

We have performed a calculation of the elastic energy density of an epitaxial superlattice of known composition profile. We assume an interplay between coherency strains and misfit dislocations as complementary matching mechanisms between consecutive layers of different composition. This model allows us to extract the strain profile and the average distance {δ} between misfit dislocations at the bilayer interfaces from high-angle x-ray data. An example of the structural characterization of an Mo/V superlattice using this model is given.