The formation of carbon nitrogen solid by the low energy nitrogen implantation is investigated. Room temperature implantation of nitrogen into the graphite was performed, and small precipitates with a diameter of 50 nm were observed in the graphite. The precipitates consist of carbon and nitrogen based upon the analysis of electron spectroscopic imaging. The carbon nitride solid has a zinc-blende structure with a lattice parameter of 0.34 nm. The results suggest that the cubic phase C3N4, which has a defect zinc-blende structure with the lattice parameter of 0.343 nm, is formed in the graphite by the nitrogen implantation.
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Yamamoto et al. (1997) studied this question.
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