SPARSE (spatially phase-retarded spectroscopic ellipsometry) for real-time film analysis

In this Letter, we propose a novel type of spectroscopic ellipsometer, named spatially phase-retarded spectroscopic ellipsometry (SPARSE), based on the spatial polarization distribution opposed to the temporal polarization changes. SPARSE can collect all information necessary to characterize film structures with a single image acquisition, and it has the benefit of real-time measurements. For the verification, feasible experiments with single film-layered certificated reference materials and multi-layered film specimens were carried out.