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The breakdown mechanism of RF windows has been investigated. The localized multipactor electron bombardment, accompanied by rapidly growing alumina luminescence leading to the surface melting, were observed by the resonant ring test. The puncture is found to be induced by surface melting. TiN coating on the alumina disk was confirmed to suppress secondary electron emission and to prevent multipactor bombardment.>
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Saito et al. (1989) studied this question.
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