Diffraction efficiencies of optical gratings are low when used at grazing incidence for X-ray spectroscopy, because conventional ruling procedures introduce inevitable irregularities in the groove profile. For X-rays to be diffracted efficiently the diffracting surface should consist of an unblemished optically worked surface interrupted by equally spaced grooves. Two methods are described for producing such gratings: in one of them, the X-ray grating is derived from a ruled grating via an etching and replicating procedure and in the other, the X-ray grating is derived photographically.
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Sayce et al. (1964) studied this question.