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The variation by a factor of 2 in the observed permittivity of yttrium oxide film is explained in terms of interfacial polarisation based on the Y2O3/SiO2 double-layer model. Provided the dielectric relaxation time constants of the two layers are grossly dissimilar, the model can also explain the frequency independence of the composite capacitor.
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C.H. Ling (1993) studied this question.
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