Mass Spectrometric Observation of Decomposition Products SFx (x=1, 2) in SF6 Discharge at 13.56 MHz

The presence of a smaller mass fragment SF2 was indicated from the output signal of a quadrupole mass spectrometer by means of direct sampling from an SF6 discharge space at a pressure of 50 or 100 mTorr. Its intensity was observed to increase with the discharge power according to the degree of fragmentation of SF6.