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July 1, 1992Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Appearance mass spectrometry of neutral radicals in radio frequency plasmas

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HSH. SugaiTohoku UniversityHTHirotaka ToyodaNagoya University

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Sugai et al. (1992) studied this question.

synapsesocial.com/papers/6a9edce46fdb0dc73c916630https://doi.org/10.1116/1.578226
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