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July 1, 1994Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Role of ions in reactive ion etching

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JCJ. W. CoburnUniversity of Utah

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J. W. Coburn (1994) studied this question.

synapsesocial.com/papers/6a937b7d28fcb4e26d950820https://doi.org/10.1116/1.579330
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