The laser damage thresholds of various types of antireflection (AR) coatings for an UV (355-nm) laser system were measured. Among them, the coatings consisting of two low-index materials, SiO2 and MgF2, had the highest average thresholds: 2.1 J/cm2 fused silica substrates and 2.6 J/cm2 sapphire substrates. The SiO2/MgF2 coating is hopeful for UV laser component.
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Tamura et al. (1989) studied this question.
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