Low-loss InGaAsP/InP submicron optical waveguides fabricated by ICP etching

The fabrication and characterisation of low-loss InGaAsP/InP optical submicron waveguides made with ICP etching is reported. Their width ranges from 0.2 to 2 µm. For the 0.5 µm width, the propagation losses at λ=1.55 µm as low as 4.2 dB/mm have been measured.