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Thickness variations that are associated with the vacuum chuck were observed in wet-chemical-derived dielectric films applied by the spin-coating technique. These thickness variations are controlled by factors such as the thermal properties of the substrate material, the evaporation behavior of the coating solution, and the physical design of the vacuum chuck. Atechnique is described for evaluating the magnitude ofthis effect.
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Dunbar P. Birnie (1992) studied this question.
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