Spectroscopic measurement of electron temperature and density in argon plasmas based on collisional-radiative model

The present paper describes a spectroscopic method for determining the electron temperature T e and density N e in argon plasmas on the basis of a collisional-radiative model of argon. We measured T e and N e in a positive column of an argon dc discharge by the method developed, and compared them with those obtained by a Langmuir probe. The results for T e obtained by the spectroscopic method agreed roughly with those by the probe. However, a limitation of our method for obtaining N e was found.