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May 1, 1999Surface and Interface AnalysisOpen Access

Micromachined SPM probes with sub-100 nm features at tip apex

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Authors

GSG. SchürmannBohn Stafleu van Loghum (Netherlands)PIP.-F. IndermühleUSU. StauferDelft University of Technology

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Schürmann et al. (1999) studied this question.

synapsesocial.com/papers/6a939a69f3532cd145ebbfa8https://doi.org/10.1002/(sici)1096-9918(199905/06)27:5/6<299::aid-sia510>3.0.co;2-v
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Also Consider

Synapse has enriched 2 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Micromachined aperture probe tip for multifunctional scanning probe microscopy1997 · 57 citations
  2. 2Micromachined submicrometer photodiode for scanning probe microscopy1995 · 70 citations