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November 1, 1995Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Surface investigations by scanning thermal microscopy

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Authors

MSM. StopkaUniversity of KasselLHLubomir M. HadjiiskiUniversity of MichiganEOE. OesterschulzeUniversity of Kaiserslautern

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Cite This Study

Stopka et al. (1995) studied this question.

synapsesocial.com/papers/6a939b8a84ddc81fac72046bhttps://doi.org/10.1116/1.588094
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