Demonstration of guided-wave phenomena at extreme-ultraviolet and soft-x-ray wavelengths

We report an explicit demonstration of classical guided-wave propagation at XUV and soft-x-ray wavelengths. Experiments were performed using narrow-band synchrotron radiation at 5, 20.8, 21, and 30 nm. Free-standing gold transmission gratings served as waveguide structures. These structures had a 300-nm grating period with waveguide channel widths as small as 100 nm and were as thick as 700 nm in the direction of guided-wave transmission. Guided-wave phenomena were manifest in strongly asymmetric diffraction patterns resulting from the angular tilt of the transmission-grating normal from the incident-beam direction.