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The application of attenuated-total-reflection spectroscopy to the measurement of the absorption coefficient of thin films is presented. For low absorption the sensitivity of ATR is discussed in terms of the concept of an effective thickness. Both the case in which the refractive index of the film is higher and the case in which it is lower than that of the ATR trapezoid are considered. Experimental ATR data for antireflection-coating materials for laser windows is analyzed and compared with calorimetric data.
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Holm et al. (1978) studied this question.
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