The dependence of the surface morphologies, electrical and optical properties of MBE grown layers on the surface cleanliness of both and substrates after being treated by a thermal treatment procedure in a vacuum prior to growth was studied by using RHEED and AES and by measuring the Hall effect and photoluminescence. The major contaminants on the surface of both and after chemical treatment are carbon and oxygen. Carbon absorbed on the surface of both and can be easily decomposed by thermal treatment above 420°C. On the other hand, there is quite a difference between and concerning the removal behavior of the residual oxide layers. The thermal treatment temperatures required to completely remove these oxide layers are 560°C for and 620°C for . The characteristics of the MBE grown layers depend mainly on the surface cleanliness of the substrate after the thermal removal of the residual oxide layers. In order to achieve a high quality grown layer, it is recommended that the thermal treatment be in the comparatively wide region between 560° and 630°C for the growth of on and in the extremely narrow region between 620° and 630°C for the growth of on .
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Niina et al. (1983) studied this question.