SOFT MAGNETISM OF Fe-Cu THIN FILMS WITH NON-EQUILIBRIUM PHASE DEPOSITED BY ION BEAM SPUTTERING

The requirements of the soft magnetic thin films are to have large saturation magnetization 4πMs, small coerclvity Hc, enough high permeability, finite electrical resistivity, etc. The pure iron thin films with the Cu content XCu of 0 at.%Cu did not show any clear peaks. The peaks became clearer gradually as XCu increased. The structure of the Fe-Cu thin films was amorphous-like, bcc and fcc phases for XCu in ranges of 0-10, 10-40 and more than 40 at.%, respectively. On the other hand, 4 Ms decreased monotonically as XCu increased. However, 4πMs decreased remarkably when XCu became more than 50 at.%. The coercivity Hc of the film thickness of 0.4 μm showed the lowest value of 0.3 Oe at XCu of 32.8 at.% where 4πMs was 11.4 KGauss. The films exhibited the excellent thermal stability and corrosive resistance.