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A highly sensitive method of obtaining the permeability of magnetic film without limitations in sample size was developed based on the electrical impedance of magnetic film in contact with microstrip meander lines. The permeability of a CoNbZr thin film (25 × 25 mm, 0.1-μm thick) was evaluated in a frequency range of 100 MHz-8 GHz; the measured values roughly corresponded to those obtained with the Landau-Lifshitz-Gilbert equation. The proposed method shows promise for measuring the permeability of wafer-sized samples because it is not restricted by size limitations.
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Takahashi et al. (2011) studied this question.
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