Inductively coupled plasma damage in GaN Schottky diodes

The effects of H2 or N2 plasma exposure on the current–voltage characteristics of GaN Schottky diodes were examined as a function of source power and rf chuck power. Under all conditions there was a strong reduction in diode reverse breakdown voltage and an increase in forward and reverse currents. The results are consistent with creation of a thin (⩽600 Å) n-type conducting surface region after ion bombardment of the GaN surface. Much of the degradation in diode quality can be recovered by annealing in N2 at 750 °C.