Fe-M-(O, F) (M=Si, Mg, Y, Zr, Ca, Al) films were prepared by co-sputtering of Fe and ceramic targets. These films have a network-like structure composed of metallic fine grains with a diameter of about 50∼100Å and ceramic-like boundaries. Those films that consist of bcc-Fe grains have soft magnetic properties and low magnetostriction in the as-deposited state. Their permeability has a good frequency response, which seems to be attributable to the reduction of eddy current losses by the highly resistive boundaries.
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Furukawa et al. (1994) studied this question.
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