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SUMMARY A method of making high resolution zone plates for use as the focusing elements in soft X‐ray microscopy is briefly described. Tests carried out on these zone plates indicate a first‐order diffraction efficiency of ∼0.3% rather than the calculated value of ∼0.9%. This indicates that the zones are not positioned as accurately as expected, a conclusion also drawn from tests at optical wavelengths on electron micrographs of the zone plates. Modifications to the manufacturing method to enable zone plates with improved imaging properties to be made are described.
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Michette et al. (1985) studied this question.
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