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ADVERTISEMENT RETURN TO ISSUEPREVFeaturesNEXTPeer Reviewed: Silicon Micromachining: Sensors to Systems Although traditionally an engineer's technique, micromachining has the potential to enable new analytical applications Gregory T. A. Kovacs, Kurt Petersen, and Michael AlbinCite this: Anal. Chemi. 1996, 68, 13, 407A–412APublication Date (Web):May 24, 2011Publication History Published online24 May 2011Published inissue 1 July 1996https://pubs.acs.org/doi/10.1021/ac961977ihttps://doi.org/10.1021/ac961977iresearch-articleACS PublicationsRequest reuse permissionsArticle Views553Altmetric-Citations88LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstract
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Kovacs et al. (1996) studied this question.
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