Terrace-width distributions on vicinal Si(111)

Using scanning tunneling microscopy, we have quantitatively characterized the configurations of steps on vicinal Si(111) surfaces misoriented by 1.2^∘{} and 2.3^∘{} towards the [1{} 1{} 2] direction. The measured terrace-width distributions are strongly peaked, consistent with predictions for thermally wandering steps. However, the distributions are much narrower than predicted for the simple terrace-step-kink model, indicating that the steps interact with energetic short-range repulsions. The magnitude of this energetic repulsion is gauged from a Gaussian fit to the data. The width of the distribution scales with step density as expected for repulsions which decay as the inverse square of step separation.