Fast characterization of moving samples with nano-textured surfaces

We characterize nano-textured surfaces by optical diffraction techniques using an adapted commercial light microscope with two detectors, a CCD camera and a spectrometer. The acquisition and analyzing time for the topological parameters height, width, and sidewall angle is only a few milliseconds of a grating. We demonstrate that the microscope has a resolution in the nanometer range, also in an environment with many vibrations, such as a machine floor. Furthermore, we demonstrate an easy method to find the area of interest with the integrated CCD camera.