In 1991 we demonstrated the use of a deposition machine that injected liquid sol-gel material into a vacuum chamber at room temperature for the production of high quality lead zirconate titanate (PZT) thin films. This year we have modified the machine to produce strontium titanate and barium strontium titanate films of sufficient quality for DRAM applications.
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McMillan et al. (1994) studied this question.
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