Ferroelectric lead-free thin films of 0.5(Ba0.7Ca0.3TiO3) – 0.5[Ba(Zr0.2Ti0.8)O3] (BCZT) were successfully deposited by pulsed laser deposition on Pt/TiO2/SiO2/Si substrates using a ceramic BCZT target prepared by conventional solid state reaction. The in (111) direction orientated 600 nm thick films shows a clamped piezoelectric response of approximately d33,f = 80 pm/V and a dielectric coefficient of about ɛr = 1010; these are close to values obtained for lead zirconate titanate (PZT) films.
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Piorra et al. (2011) studied this question.
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