Spin Torque Switching of Perpendicularly Magnetized CoFeB-Based Tunnel Junctions With High Thermal Tolerance

In order to launch spin transfer torque-based magnetoresistive random access memory into mass production below the 40 nm technology node, high performance perpendicularly magnetized magnetic tunnel junctions (pMTJs) are crucial. One of the key issues for pMTJs is to ensure compatibility with conventional back-end-of-line (BEOL) heating process, where thermal tolerances over 350^ Cfor standalone memory and 400∘ Cfor embedded memory are typically required. In this work, we successfully demonstrated high thermal tolerance in CoFeB-based pMTJs with a synthetic antiferromagnet (SAF) pinned structure while keeping stray fields on the free layer low. The annealing temperature(Tₐₙₙₑₐₗ)dependence of spin torque switching (STS) and TMR characteristics revealed that the reduction ofI_ c0, the increase ofΔ, and the increase of TMR ratio were achieved by elevatingTₐₙₙₑₐₗfrom 250∘ Cup to 380∘ Cfor 30 min. Thus, we attained high STS efficiency(I_ c0/Δ)=0.88(I_ c0=69\ μ A,Δ=78),TMR\ ratio=120%,RA=12\ Ωμ m²atTₐₙₙₑₐₗ=380\, ∘ Cfor the pMTJs with dimensions of 44–46 nm in diameter. Moreover, by using specially tailored pMTJs with a SAF pinned structure, we achieved high thermal tolerance up to 400∘ Cfor 30 min while keepingI_ c0/Δ=1.12(I_ c0=56\ μ A,Δ=50),TMR\ ratio=150%,RA=13\ Ωμ m².